Device lineup for MEMS sensing and network devices
Introducing the device that received great acclaim at the MEMS exhibition. It streamlines processes such as polarization treatment, etching, and firing.
Our company offers a range of equipment that plays a vital role in each process of MEMS production, from wafer cleaning to etching, stripping, and inspection. At the "MEMS Sensing & Network System Exhibition 2020," we will showcase products that received significant feedback from visitors. We will introduce equipment that contributes to process efficiency. [Exhibited Products (Partial)] < Piezoelectric MEMS Plasma Polling (Polarization Processing) Equipment > Exhibits excellent uniformity and demonstrates a high polarity effect of up to 90% < Ion Milling Equipment for Piezoelectric and Magnetic Materials > Models capable of processing six 100mm wafers simultaneously are available < High-Power, Short Pulse Control Light Sintering Equipment > Can control the irradiation light in microseconds, heating instantly without damaging the substrate
- Company：日立ハイテク
- Price：Other
